Used SVG 8600 #293758579 for sale

SVG 8600 is a wafer and mask scrubber, an advanced dry and wet cleaning equipment from SVG. The system provides efficient, repeatable cleaning and optimized processing for today's microlithography-intensive semiconductor and flat panel display (FPD) production lines. It comes equipped with a class 1 hard enclosure and a side-loading mechanism that can accommodate both wafer and mask substrates—in either flat or cassette formats. The scrubbing process begins with a patented atmospheric pressure plasma jet that is optimized to remove particles, films, and residue from the surfaces of the wafer or mask substrates. This plasma jet develops a surface charge that enables the process to remove highly charged metals, such as copper and aluminum.Next, compound scrubbing technique uses an aggressive mechanical motion combined with an exclusive lubricant to remove contaminants for a more effective clean. To further enhance the scrubbing process, 8600 features a multi-stage wash. This wash uses high-pressure, de-ionized spray to provide a more complete and thorough cleaning than any single-stage unit currently available on the market. The spray is released from a bank of advanced nozzles that are designed to cover the entire surface of the substrate. In addition to its enhanced scrubbing capabilities, SVG 8600 also features a variety of precision measurements to monitor and control the cleaning process. The machine features both contact spacing and wafer diameters measurements, as well as an edge tracking tool that allows for precise process control. Finally, 8600 has extensive software capabilities that enable it to easily integrate into existing process control architectures. Its Repeat Clean Cell (RCC) Subsystem Software not only automates the cleaning process, but also facilitates data collection and analysis, to ensure reliable and consistent results from run to run. In this way, it ensures the highest quality cleanings for all types of substrates and applications. Overall, SVG 8600 provides a powerful and precise scrubbing asset that is designed to maximize quality and minimize cycle times. With its advanced cleaning process and extensive measurements, it provides a clean and consistent surface finish, as well as superior reliability and repeatability. 8600 is the ideal choice for any microlithography-intensive production line.