Used SVG 8600 #293758581 for sale
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SVG 8600 is an automated wafer and mask scrubber designed to efficiently clean and prepare wafer and mask surfaces for additional fabrication. The scrubber utilizes a rotary brush equipment to apply a scrubbing action that can remove surface contaminants, such as metal particles and metal oxides, as well as photoresist residue. The rotary brush provides thorough and uniform removal of residues from critical edge sections, without damaging the delicate wafer or mask surfaces. This eliminates the need for manual scrubbing, leading to a more cost-efficient production process. The scrubber is equipped with dual brushes, a standard brush for general use and a special brush for rough or difficult applications. The standard brush is designed to deliver a gentle scrubbing action, while the scrubbing action of the special brush is up to ten times the strength of the standard brush. This allows the scrubber to target the toughest of residue types, leaving the wafer or mask surface clean and well prepared for additional processing. The scrubber has a cleaning tank with a volume of up to 6 liters. This allows for the simultaneous use of several wafers or masks for throughput and efficiency purposes. The scrubber is capable of both wet and dry cleaning, making it suitable for a wide range of substrates and applications. The scrubber includes a conveyor to transport wafers and masks into and out of the cleaning tank. The conveyor belt is adjustable, allowing for the precise control of the scrubbing motion. The belt speed can be set from 0 to 600 rpm, providing control over the scrubbing action. The scrubber is driven by a proprietary microprocessor-controlled system that monitors and controls the scrubbing operation. The unit features a self-diagnostic machine with warning and alarm functions, as well as an advanced timer-based job scheduling tool. Overall, 8600 is a powerful and reliable wafer and mask scrubber designed to enable accurate and efficient substrate preparation. The combination of its dual brushes, adjustable conveyor and microprocessor-controlled asset make it the ideal equipment for many wafer and mask cleaning applications.
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