Used SVG 8600 #9404481 for sale
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SVG 8600 Wafer and Mask Scrubber is an automated polishing equipment designed to enable high throughput cleaning of wafers in the semiconductor industry. It uses a unique combination of both energized and non-energized media to scrub and polish wafers and masks. 8600 features a robotic arm for removal of the wafer and mask at the completion of the cleaning cycle, allowing for high throughput and precision cleaning of the wafer and mask in an efficient and cost-effective manner. The integrated scrubber has been designed to enable the user to quickly and accurately start the cleaning cycle and provide an ideal cleaning solution for a variety of substrate types. SVG 8600 is designed to activate a variety of scrubbing and polishing media, allowing the user to customize their cleaning requirements. The system also offers a user-friendly interface, enabling easy setup and optimal cleaning performance. The controller is connected to the robotic arm and enables the user to select between several scrubbing and polishing media and cleaning cycle options. The Intelligent Programming Unit (IPS) further allows for automatic adjustment of the scrubbing and polishing media according to the substrate type. The robotic arm is utilized to move the wafer and mask into the scrubber and transport it for quick and efficient cleaning. The scrubber is set to maintain certain scrubbing and polishing parameters to ensure optimal cleaning of the substrate and maintain high-quality results. The machine is capable of scrubbing and polishing a variety of substrates including photomask, wafer, and other SEM CMP targets. Wafers and masks are clamped into a holder and the scrubber initiates a series of highly accurate scibliy-patterned strokes over the substrate. The robotic arm then transports the substrate and mask out of the scrubber, allowing the user to remove them continually and repeat the scrubbing process as necessary. 8600 is thoroughly tested and certified for compliance with ISO 14001 and 9001 standards. Its components are also designed with a high degree of reliability to maximize throughput and minimize downtime. This complete cleaning solution makes it ideal for the semiconductor and fabless manufacturing industries, who are in need of a cost-effective, high-quality solution for wafer and mask scrubbing and polishing.
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