Used SVG 8600 #9411945 for sale

SVG 8600 is a wafer and mask scrubber from Semi-Tek, a leading manufacturer of semiconductor process equipment. This scrubber is intended to provide superior cleaning of surface contaminants, such as photoresist, on semiconductor wafers and masks. Its cleaning process is fully automated and uses oxygen radicals to ensure a thoroughly clean substrate. 8600 is a versatile and reliable cleaning equipment. It utilizes an oxygen vacuum to remove process-generated residuals without altering the substrate and mask properties. The system can handle wafers up to 8 inches in diameter and masks up to 10 inches in size. Moreover, it is equipped with an integrated scrubber unit to remove particles and contaminants from the surface. SVG 8600 utilizes a two-stage cleaning cycle. The first stage uses an oxygen vapor to remove organic compounds from the surface. This vapor is created in a sealed reaction chamber and delivered through the wafer or mask. The vapor then reacts with the organic compounds on the surface, attaching itself to them and breaking them down into oxygen radicals. In the second stage of the cleaning cycle, the oxygen radicals attach to the particle and contaminant surfaces, oxidizing them. After oxidation, the gases and particulates are drawn away from the surface by the vacuum. This process is repeated several times and is designed to provide cleaner substrates and masks than typical wet scrubbing processes. The machine is controlled and monitored by a PC-based software suite. This suite includes support for fault diagnostics and a library of common faults and solutions that guide the tool operator through the troubleshooting process. It also provides real-time reporting of asset parameters and can be interfaced with process management software. The model is also fully customizable. The scrubber head can be moved in both the x and y directions to allow for the cleaning of different shapes and sizes of substrates. Additionally, the step speed and dwell time can be adjusted to allow for the user to tailor the cleaning parameters to specific requirements. The equipment is also equipped with an ionizer to eliminate static electricity from the substrate or mask before cleaning. In conclusion, 8600 is an automated wafer & mask scrubber designed for superior cleaning and surface decontamination. It is versatile and offers a fully customizable cleaning cycle and a diagnostic software suite for troubleshooting. It is reliable, effective and ensures a clean substrate and mask every time.