Used TEL / TOKYO ELECTRON Cellesta+ #293592925 for sale
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TEL / TOKYO ELECTRON Cellesta+ is a automation equipment tool used for scrubbing and developing of photomask and wafers, within the semiconductor fabrication process. The equipment is designed to reduce the strain and time of manual scrubbing and cleaning of masks and wafers in a single setup. The device integrates an advanced and specialised automated scrubber that uses vertical single head, high pressure technology and scrubbing motion to effectively clean and remove resist residue from resist plated wafers. It has a high cleaning speed and capacity (max of 5 wafers per head) to optimise process flexibility for different applications and is equipped with pre-installed communication software for user control and coordination. The automatic calibration system also allows for greater accuracy when working on fine structures. TEL Cellesta+ also includes a highly advanced cleaning tank, equipped with a powerful flow control unit that not only cleans and dries the photomask quickly, but also prevents the drift of particles from the mask during the scrubbing process. The advanced machine technology also maintains the cleaned area's surface temperature in order to maintain the highest quality standard when working on sensitive structures. TOKYO ELECTRON Cellesta+ is designed and equipped with an advanced resist film measurement tool, which is capable of measuring the thickness of resist films with a maximum accuracy of ±50m on both dry and wet layers. This enables users to monitor the etching process to ensure that it is proceeding correctly and that no residues remain. In addition, the asset is designed to support a wide range of chemical substrate materials such as photoresist, metals, plastics and inorganic materials. It is also highly compatible with both high and low viscosity chemical solutions for various cleaning needs. Moreover, Cellesta+ is also equipped with an ergonomic design that ensures the highest comfort level by providing the user with the best view and position of any model in the series. All these features, together with its advanced automated scrubber make TEL / TOKYO ELECTRON Cellesta+ an extremely powerful and reliable tool for the handling of photomask and wafers.
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