Used TEL / TOKYO ELECTRON Cellesta #67641 for sale

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ID: 67641
Wafer Size: 12"
Wafer clean tool, 12", 8 SVOS and 4 Spin Includes: Platform SC1 Unit SC2 Unit DHF (1:10) Unit O3 Cleaner (Qty 4) SWC Spin Unit (Qty 8) SVOS Unit CO2 Injection Unit 03 Generator with O3 Killer SC1 Concentration Monitor SC2 Concentration Monitor DHF (1:10) Concentration Monitor (Qty 2) N2 Flow Controller.
TEL / TOKYO ELECTRON Cellesta is a wafer and mask scrubber, focusing on precise and reliable cleaning of photomasks and wafers used in the semiconductor industry. It offers superior speed and efficiency in cleaning wafers. TEL Cellesta has four models that effectively clean a wide range of photomasks, including quartz, optical flat, quartz and glass. TOKYO ELECTRON Cellesta uses wet etching, a process that cleans mask and wafer surfaces with solutions such as hydrogen fluoride. The wet etching process helps to remove particles and contaminants that can cause defects in the photomasks. It ensures flawless prints on the wafers and masks while maintaining the quality of the end products. Cellesta uses three stage processes to ensure proper cleaning. In the first step, a chemical scrubber prepares the wafer surface to accept the etching solution. This helps to release all the contaminants from the surface, which is then ready for the second step, the gentle wet etching. In the second step, with a precise and uniform nozzle, the etching solution is sprayed onto the wafer's surface. This helps to dissolve the particles, contaminants and organic residues from the wafer without damaging its chemical composition or the sensitive optical properties. In the third step, TEL / TOKYO ELECTRON Cellesta enables the drying process by using high- energy beams to evaporate the etching solution. TEL Cellesta also has an additional deoxidation module, which utilizes ultraviolet radiation to reduce residual contaminants on the mask and wafer surfaces. This helps to create a better etching solution and decrease the time of cleaning. Moreover, a high-tech control system helps to minimize contamination and track the chemical usage of etching solution, minimizing waste and cost. Overall, TOKYO ELECTRON Cellesta is an efficient wafer and mask scrubber that helps to clean the photomasks and wafers with utmost precision and accuracy. It helps to maintain the chemical composition and optical properties of the final products.
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