Used TEL / TOKYO ELECTRON NS 300 #9228401 for sale

TEL / TOKYO ELECTRON NS 300 is a wafer and mask scrubber, designed for semiconductor process operations. It enables high-efficiency, low-particle processing. TEL NS 300 provides an automated wafer scrubbing operation, which is critical for larger process runs where a manual approach may be inefficient. This includes scrubbing the edge of the substrate before loading into the process chamber, cleaning used holders, and finalizing cleaning operations after processing. The scrubber is equipped with a main platform that supports the wafer and process holder, as well as a set of "arms" to securely hold the wafer or mask and rotate them for scrubbing. It is capable of horizontal or vertical rotation, with speeds as high as 7000 RPM. The scrubber also has a dedicated tank equipment for etching solutions, with an automated fill and drain system. The scrubber is equipped with two washing dispensers capable of handling both liquid and powder-based cleaning agents. These are dispensed on the substrate and process holder while they are spun at high rpm. The scrubber has an efficient set of features to minimize particle pollution, such as an integrated vacuum unit that traps particles and deposits them into a transfer container. The scrubber features a particle counter that monitors for particles bigger than 0.5 μm, as well as an advanced remote control machine that can control the scrubber from authorized remote locations. The NS 600 is compliant with the SEMI S2 standard for minimization of particle pollution, and is the most efficient of its class. This industry-leading product leads the way for the development of clean and efficient semiconductor process operations.