Used TEL / TOKYO ELECTRON SS-4 #293658182 for sale

TEL / TOKYO ELECTRON SS-4 is a sophisticated automated wafer and mask scrubber used in semiconductor processing. Designed to minimize particle contamination, it utilizes advanced scrubber technology to gently and efficiently remove tough, stubborn particles from wafer surfaces, and scrub and clean mask components with maximum efficiency and minimal abrasion. The unit is an ideal solution for automated scrubbing of various materials, such as wafer steppers, photomasks, plasma etching systems, spin cleaners, and other components. The equipment features a compact design and is constructed of robust stainless steel that ensures durability and reliability for long-term use. It also incorporates a state-of-the-art software platform that allows for easy operation and flexible programming. TEL SS-4 comes with an intuitive user interface, including a large touchscreen display for proper navigation and view of the parameters, while providing audio and visual notifications of the scrubbing cycles for easy monitoring. With integrated contamination monitoring sensors, the unit safely and accurately detects particle contamination and alerts the user when the necessary scrubbing threshold is reached. The advanced scrubber employs a highly efficient brush scrubbing action that offers superior cleaning capabilities for a wide range of wafers and masks. It also features an adjustable scrub direction, adjustable scrub pressure, and variable scrub speed, which can be optimized for optimal scrubbing results. The unit includes multiple types of brushes that can be changed out as needed, such as conventional brushes, diamond brushes, and foam brushes, for improved scrubbing efficiency. TOKYO ELECTRON SS-4 is equipped with an integrated vacuum filter component that captures particles, helps to reduce the impact of airborne particles, and improves process quality and cleanroom environment. This system also includes a slurry filter to prevent particulate buildup, a process water filtration unit, and a rinse water machine which helps to reduce waste water discharge. Furthermore, SS-4 is compliant with current CE and FCC safety regulations, and is also compatible with existing scrubber and cassette systems. It is an effective and efficient automated scrubber that offers superior performance and excellent reliability, making it an invaluable tool for any semiconductor processing facility.