Used TEL / TOKYO ELECTRON SS-4 #293814162 for sale

TEL / TOKYO ELECTRON SS-4 wafer and mask scrubber is an automated equipment designed to clean and maintain semiconductor wafers and masks by removing native oxides and particles that form during storage and/or processing. The system features wet, dry, and plasma cleaning technologies to provide fast and thorough cleaning of wafers and masks. Specifically, the wafer scrubber uses an innovative, multi-stage procedure to effectively clean hard to reach areas of the wafer and mask. The unit is completely automated and can be operated with a single control panel. It features automated program settings that allow users to customize their cleaning settings for specific tasks. Furthermore, it is equipped with an automatic rinse cycle that helps ensure that all materials are thoroughly cleaned. The output is constantly monitored to ensure high-quality results. The wet scrubbing procedure consists of a series of beds coated with specialized cleaning solution. This is then combined with ultrasonic actuation that allows for an effective cleaning of contaminants. The dry scrubbing process utilizes mechanical scrubbing aided by dry cleaning process and a plasma stream. The plasma stream changes the structure of contaminants, making them easier to remove. Once the contaminants have been removed, a solvent and detergent are added to the wafer before being further cleaned. TEL SS-4 is a powerful and efficient wafer and mask scrubber with multiple cleaning cycles for optimum results. It ensures thorough cleaning of fixtures under the control of an automatic purge cycle. In order to ensure repeatability and consistency, the machine is equipped with integrated temperature and humidity sensors to monitor process conditions. The tool is capable of maintaining high-quality, repeatable results, even when under the toughest production conditions. Additionally, it offers multiple flexibility options in order to suit any specific application.