Used TENNANT T5 #9311698 for sale

TENNANT T5 is a wafer and mask scrubber designed for use in semiconductor manufacturing. It is a reliable, cost-efficient scrubbing equipment that is designed to maximize productivity and reduce costs associated with wafer and mask cleaning. T5 consists of a motorized wafer cradle and a set of actuators, including a cross-arm base, guide rolls, and arm-lift levers. The autostage drive is designed to move the wafer laterally and rotates the wafer through a full 360 degrees. The scrub head is designed to scrub both resist and substrate with an abrasive to clean the wafer completely without substrate damage. TENNANT T5 is operated through a user friendly interface. The user may select any number of parameters such as pressure, speed, and timer settings to achieve a desired cleaning performance. The user may also choose to have the machine automatically stop and start based on predetermined wafer size or other criteria. The machine is designed to work with multiple layers of mask material, handles mask and wafer sizes up to 450 mm, and offers repeatability to 0.1 micron accuracy. This ensures improved process consistency and uniformity across the lot. T5 uses a wet scrubbing process which removes wet particles and substrates efficiently without the need for a dryer or redirecting. This reduces process time significantly while improving final product quality and throughput. TENNANT T5 incorporates built-in safety features such as low-pressure guidance, low-pressure warning, and emergency interlock. This prevents personal injury or damage to the wafer and/or mask material. T5 is equipped with a data collection system that enables process monitoring and control. The unit records operational variables such as scrubbing speed and pressure together with the wafer/mask statistics enabling process logging for traceability. TENNANT T5 is an extremely versatile scrubbing machine designed to reduce contamination, improve yields, and maximize process documentation. The tool ensures a clean wafer and mask. Its efficiency and cost-effectiveness yield an overall economic advantage that is beneficial to many businesses.