Used ULTRA-T EQUIPMENT / UTE SCS i124 #9179533 for sale
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ID: 9179533
Substrate cleaning system
Cleaning options:
Pressure / Megasonic nozzles
Chemical dispenses
Heated DI water
Substrates: Upto 12” to 20” diameter.
ULTRA-T EQUIPMENT / UTE SCS i124 is a semi-automatic wafer & mask scrubber designed to meet high volume requirements in semiconductor manufacturing. The machine is capable of scrubbing multiple wafer and mask combinations, with a throughput of up to 12 wafers per minute. UTE SCS i124 provides precise control of the scrubbing process to ensure high quality results for consistent device performance. ULTRA-T EQUIPMENT SCSI124 has an integrated wafer transport equipment with a dedicated transfer arm. It provides a smooth and reliable process, to move wafers and masks onto the scrubbers and into the cleaning chamber. The scrubber is loaded with a drying station for thorough cleaning. The cleaning process can be adjusted to achieve a wide range of results including aggressive cleaning of organic particles, cleaning of oxide layers, oxide etch, or reconditioning. SCSI124 is equipped with three-axis scrubber modules and automated cleaning processes, allowing for a swift transition from scrubbing to drying or an additional scrubbing cycle. The scrubbing modules feature an adjustable cleaning pressure and cleaning speed for precise control over the cleaning parameters. ULTRA-T EQUIPMENT SCS i124 is capable of producing high quality results, regardless of the wafer surface, because of the scrubber's variable cleaning parameters. UTE SCSI124 also comes equipped with an advanced vision system which is used to monitor wafer and mask conditions, before and after scrubbing. The vision unit is designed to detect and identify contaminants as small as those present in the 0.2um-7um range. The vision machine provides real-time feedback on the scrubbing results, allowing processing staff to make adjustments on the fly if necessary. ULTRA-T EQUIPMENT / UTE SCSI124 has several safety features built into its design. It is designed with an actively monitored tool for damage/oxidation detection, and capable of auditing wafer and mask surfaces automatically. Optional accessories available with the machine such as nitrogen and humidity control units, spin rinsers, color-based vision systems, and hopper bundler allow for more efficient and higher yielding processing. SCS i124 provides a reliable, high-quality, and efficient scrubber. It is easy to maintain, offering significant reduction of the cleaning cycle time and cost by producing consistently excellent results. ULTRA-T EQUIPMENT / UTE SCS i124 is an ideal choice for any semiconductor production environment seeking to maximize productivity with precise wafer and mask cleaning.
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