Used VIRON VVS-120144 and VVS-120120 #198040 for sale
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ID: 198040
Process exhaust scrubbers:
(2) 58,000 CFM
(2) 50,000 CFM
(1) 22,000 CFM
Multiple Exhaust Fans.
VIRON VVS-120144 and VVS-120120 wafer & mask scrubber systems provide automatic cleaning and drying of six-inch silicon wafers and photomasks. Clean, dry, and high-performance parts are essential components of semiconductor device fabrication. The scrubber systems from VIRON offer automated cleaning and drying of parts as large as 6 inches to meet the exacting standards required for today's electronics manufacturing. The VVS-120144 equipment delivers clean, dry wafers and photomasks within minutes. The automated system consists of a scrubber cell, a robotic arm, and drying and CVC modules. The scrubber cell performs surface cleaning and thoroughly rinses clean wafers and masks. The robotic arm then transfers the wafers and masks to the drying and CVC modules for drying and measurement. The VVS-120120 unit is a single-bay machine designed for use with cleaning solutions. This delivers the same thorough cleaning and drying of materials without the need for an additional robotic arm and drying and CVC modules. Each tool utilizes a patented V-Moss cleaning and rinse technology. This technology utilizes a specially designed brush to agitate and clean the surface of the parts. Simultaneously, high-velocity, low-profile air streams are used to aid in rinsing away any residue. The V-Moss asset is designed to gently but firmly remove surface contaminants and particles, ensuring a high-quality, clean surface. VVS-120144 and VVS-120120 systems also support part integrity testing and monitoring. The systems have multiple built-in testing capabilities, designed to ensure reliable accuracy and repeatability. This includes spectral photometry and visual inspection modules to test for individual surface-level electrical properties of the parts. In addition, VIRON scrubber systems can be integrated with software programs, connecting a library of cleaning fluids with VIRON VVS-120144 and VVS-120120 systems. This technology allows users to select optimized cleaning solutions and parameters for specific materials and applications, providing higher accuracy and consistency of cleans. VVS-120144 and VVS-120120 wafer & mask scrubber systems are a reliable solution for automated cleaning and drying of six-inch wafers and photomasks. The patented V-Moss technology ensures a gentle yet thorough clean, while the built-in testing capabilities ensure reliable accuracy and repeatability. Users can also take advantage of software integration to maximize performance.
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