Used CORNING / TROPEL Flatmaster #9227960 for sale
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ID: 9227960
Wafer measurement system
Type: 128892-4280 WIN
Includes:
Main body
Computer body
Monitor
Keyboard
Mouse
Printer
Vacuum pump
(6) Chucks
Power requirement: 380 V, 2 Phase, 1 kW.
CORNING / TROPEL Flatmaster is a mask & wafer inspection equipment that offers high-speed non-contact optical inspection of masks and wafers during the semiconductor fabrication process. The system's advanced optics and imaging technology enable wafer feature detection even at the level of a 1 micron feature size, allowing high-accuracy, reliable, and repeatable results. The unit has high speed scan capability, allowing for quick defect detection. TROPEL Flatmaster combines an array of advanced features and technology for fast and accurate inspection. At the heart of the machine is a 4-channel inspection head which contains microlenses, dynamic pattern recognition (DPR), and integrated chip ID technology. This 4-channel approach allows for multi-level inspection and simultaneous measurement of 50-150 defects per chip. The tool also has computer-controlled zoom and auto-focus capability in order to maximize accuracy. The state-of-the-art dip-in optical head allows the asset to inspect difficult areas on the wafer that even conventional mechanical techniques have difficulty accessing. The model also features an integrated environmental chamber for automatic climate control. The stable environment minimizes noise signals in the image and allows consistent results to be obtained with laser and mechanical calibration as needed. The equipment is also designed with an open architecture which allows for the integration of automated wafer handling systems from multiple vendors. CORNING Flatmaster is designed to provide high resolution and repeatable results while meeting quick turnaround requirements. The system can scan 100-1700mm wafers and penetrate as far as 25mm into a mask to detect defects. The unit is easy to use, and the output can be used as an input for automated defect classifiers, CAD-integrated scanners, or further analysis. Flatmaster is a reliable and accurate mask & wafer inspection machine for the semiconductor fabrication industry.
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