Used KLA / TENCOR 2830 #9260081 for sale
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ID: 9260081
Vintage: 2010
System
Module: EFEM
Includes:
YASKAWA XU-RCM9206 Robot
Pre-aligner: XU-ACP330-B10, ERCM-NS01-B003
Controller
2010 vintage.
KLA / TENCOR 2830 is a powerful wafer testing and metrology equipment designed to measure the properties of semiconductor wafers. It has a high-resolution Infra-red (IR) imaging tool capable of detecting and measuring microscopic features on the wafer surface including defects, dopant concentrations, film thickness, grain boundaries, resistivity, and other microstructural characteristics. The system's automated software provides quick and efficient analysis of test results. It is equipped with a computerized wafer handling unit, precision and speed scanning optics, and advanced analysis algorithms. The machine can accommodate wafers up to 8 inches in diameter. KLA 2830 uses imaging technology to accurately measure the topography of a wafer surface, producing detailed images for analysis. The tool precisely measures the height and pattern of a wafer's bumps, pits, or other microscopic features. It also records the optical reflectivity of the topography in the IR spectral band, providing an appropriate range of data to identify any shortcomings that may affect device performance. The asset's automated software makes it possible to quickly acquire, review, and analyze wafer test data. This software allows users to set customized parameters such as scan area, spot size, and sampling rate to acquire the desired level of detail. The software also provides a convenient way to store and manage wafer test data. With its ability to image and identify minute features on wafer surfaces, TENCOR 2830 is a valuable tool for advanced production tests and electrical measurements on semiconductor wafers. It is also a cost-effective solution for wafer analysis and defect detection. As a result, the model has become an invaluable resource in the semiconductor industry.
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