Used KLA / TENCOR SP1-DLS #9012561 for sale
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ID: 9012561
Vintage: 2006
Particle measurement
(4) Components:
Robot handler and loadport unit
Inspection chamber unit
Operator user interface
Blower
Stored in (3) Crates:
1st crate - Robot handler and loadports
2nd crate - Inspection chamber unit
3rd crate - Blower and misc. parts/cable/cover/brackets
Deinstalled Q4 2012
Laser has low power errors
Small crack in loadport advance plate cover
Currently in storage
2006 vintage.
KLA / TENCOR SP1-DLS is a mask and wafer inspection equipment designed for use in semiconductor processing. It is a fully automated system that uses advanced optics and image processing algorithms to accurately inspect high-precision patterns on microchips and substrates in order to detect small defects. KLA SP1 DLS is designed to provide maximum performance with maximum yield, as it uses both scanning electron microscopy (SEM) and focused ion beam (FIB) imaging techniques. The unit is capable of detecting and classifying defects with a resolution of a few nanometers, enabling component manufacturers to reduce or eliminate costly manual inspections. TENCOR SP 1-DLS is equipped with state-of-the-art autofocus capabilities that enable real-time adjustments for optimum viewing angles. In addition, the machine offers a wide range of contrast and brightness adjustment tools for improved data accuracy. TENCOR SP1-DLS is designed to be completely integrated into the manufacturing process, providing a fast and reliable inspection process. The tool is capable of simultaneously inspecting multiple chips with a single scan, allowing for increased throughput and reduced cycle times. Furthermore, the asset also offers advanced defect analysis and reporting capabilities, enabling faster corrective actions when defects are identified. To ensure the highest quality control, KLA / TENCOR SP 1-DLS is equipped with modern data management and communication capabilities. The model can be easily configured to provide real-time process control and feedback to the production line. It can also be integrated with common manufacturing databases, and can even link with different types of statistical process control systems to optimize yield and decrease product failure rates. Overall, TENCOR SP 1 DLS is an advanced mask and wafer inspection equipment that offers superior accuracy, throughput, and data accuracy in an easy to integrate, automated system. Its cutting-edge features and integration capabilities make it suitable for a variety of semiconductor processing applications and help component manufacturers achieve improved production yields and cost savings.
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