Used SEZ / LAM RESEARCH DaVinci DV Prime #9045178 for sale
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ID: 9045178
Wet bench, 12"
(8) Chamber main frame, front side and backside processing
Ionization system
Filter fan unit
ISO Class 2
FM 4910 Materials
(4) Load ports
Protocol zone separation
Double side option for (2) chambers
(2) Double side DS chucks
Medium on top level double side
GEM Automation software
SMI S2 & S8 Standard
Flow monitoring and flow control
ECO End effector set
E 84 Parallel I/O
A-Jet option with DI for (2) chambers, internal supply
CO2 Enriched DI water for (2) process chambers
ASD 3: Dry option for spacer etch back for (2) chambers.
SEZ / LAM RESEARCH DaVinci DV Prime is a precision etching and ashing machine designed for high-end dicing, ablation and micromachining applications in the semiconductor, MEMS, and medical device industries. With its extreme accuracy, high throughput and low defect rate, SEZ DaVinci DV Prime is quickly becoming a preferred choice for those seeking to push the boundaries of advanced etching and ashing processes. The machine features a high-resolution 3axis motion control equipment, allowing for precise and repeatable machining processes for the etching and ashing of any material regardless of its initial properties. DaVinci's integrated build-in optical imaging systems enable precise process-monitoring, allowing users to easily optimize the process parameters to produce precise and defect-free parts. Additionally, the etching and ashing processes can be fully automated, with a proprietary interface for high-level monitoring and control. The integrated software of the machine also includes a number of additional process-related functions, such as an auto-registration system for complex geometries, an advanced edge recognition unit, and precise pattern-matching capabilities for re-defining existing processes. This enables users to have maximum process flexibility and repeatabiity. The machine also features an automated loading and unloading machine for maximum efficiency. The autoloader allows users to load large batches of parts and the unloading tool can quickly sort parts according to their etching and ashing parameters. This ensures that the final products are to the highest quality and defects are eliminated. LAM RESEARCH DaVinci DV Prime is a versatile and reliable tool designed to meet even the most stringent requirements. Its comprehensive set of features enables users to set new standards in etching and ashing accuracy and throughput, with unmatched reliability and efficiency. The machine is designed to perform in the most demanding environments and is perfect for any application requiring high-precision etching and ashing.
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