Used RIGAKU 3640 XRF #157114 for sale
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ID: 157114
Wafer Size: 6"-8"
Vintage: 2003
Wafer / Disk analyzer, 6"-8"
5 Standard elements for measuring:
Ti, TiW(90/10), Au, TiW/Au (layer 1 TiW & layer 2 Au), Ti/Au(layer 1 Ti & layer 2 Au)
Each correlation parts with (3) different thickness for measurement check
Applied to semiconductor / drive IC front end process of bumping
Configuration:
Main body: Measuring stage with vacuum function by X-ray
Main column and chamber
Single chamber only
Manual wafer transfer robot unit
Display unit:
Monitor shows statistic character on monitor
Power transformer BOC EDWARDS IL70 dry pump
Chiller: Yes
Utilities:
CDA
N2
PCW
Main M/C
Holders, 6"-8"
X-Ray tube
Ti Goniometer
Scanning goniometer
Heat exchanger
High voltage transformer
Automatic voltage regulation
Manual L/UL
Control and vision system:
Control system: PC Based with RS232 port
Operation man-machine interface: Color touch panel, 18"
Data collection: yes
Facility and environment:
Operation temperature: 15-25°C
Relative humility: ≤75%
N-2 for dry pump:
Flow rate: 10 mL/min
Pressure: 0.3~0.7 MPa (3~7kg/cm-2)
Cooling water for heat exchange:
Temperature: ≤ 30 °C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
Cooling water for dry pump:
Flow rate: 3.5 L/min
Temperature: ≤30°C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
(2) Operation manuals
Installation instruction
System module introduction
Operation instructions
Safety instructions
(2) Repair and maintenance manuals
PM Instructions
Trouble shooting instructions
Circuit diagram
208 VAC, 60 Hz, 3 Phase, 80A
Currently warehoused
2003 vintage.
RIGAKU 3640 XRF is an energy dispersive x-ray fluorescence equipment designed to measure trace element composition in materials such as soils, ores, and parts. This x-ray system combines advanced technologies such as 3D scanning, high-speed data acquisition and a multi-channel analyzer to provide results with a high degree of accuracy. At the heart of 3640 XRF is its x-ray excitation source which produces short-wavelength x-rays. A collimator then directs these x-rays at the sample material. When the x-rays interact with the material, they excite the electrons in the material and cause them to emit fluorescent x-rays. These fluorescent x-rays are then collected by a detector and analyzed by the multi-channel analyzer. The multi-channel analyzer records the intensity, energy and spectrum of the x-rays emitted from the sample material. RIGAKU 3640 XRF unit is capable of measuring the composition of different elements within a material in near real-time. This makes it useful for a wide range of applications such as process control, quality assurance and environmental monitoring. The machine also performs 3D scanning which allows for the measurement of trace elements in multiple depths and positions of samples. The tool is also designed to deliver accurate results. It uses a high-resolution multi-channel analyzer which can detect even the lowest energy elements. Additionally, the asset's user-friendly software allows data to be exported quickly and easily for further analysis. 3640 XRF model is suitable for a variety of applications in research, education and industrial settings. Its advanced technologies, accuracy, portability and quick setup time make it an ideal choice for any type of project.
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