Used CANON / ANELVA PDC-307D for sale

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CANON / ANELVA PDC-307D #75054
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CANON / ANELVA

PDC-307D

DC Sputter supply Power: 30 kW, -600 VDC, 50 A CONV5 Lamp lit Power supply: 200 V, 50/60 Hz, 3 Phase
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