Used GASONICS / NOVELLUS HIPOX 6000 #293758592 for sale

GASONICS / NOVELLUS HIPOX 6000 is a high performance, automated diffusion furnace specifically designed for semiconductor fabrication. It is a multi-zone equipment with independent temperature control of each zone that can reach up to 1200°C for thermal diffusion, oxidation, annealing, rapid thermal processing, and other related processing. GASONICS HIPOX 6000 can accommodate wafers up to 8" in diameter and has multiple options for process gas delivery. NOVELLUS HIPOX 6000 includes a graphite cold cap with an integrated in-situ cleaning shield that can be used to reduce particles entering the furnace chamber and abate particles already present. The furnace is designed with a center-mounted, programmable, two-zone conveyor belt that operates in either manual or automatic modes for batch processing. The belt is capable of running up to 12 wafers at any one time. It also offers an option for a cool-down chamber for rapid cooling with external fans. The integrated control system for HIPOX 6000 consists of an industrial PC core with a user-friendly touch-screen interface. It is capable of storing up to 100 recipes and can store up to 32 wafer lots for simple recall. The control unit allows users to monitor and adjust each zone independently, allowing for precise process control. GASONICS / NOVELLUS HIPOX 6000 is an advanced furnace that delivers high performance with reliable temperature control and low particle generating capabilities. Its advanced design allows it to perform customized recipes with its in-situ cleaning capabilities. It also has the capacity for high throughput with its 12-wafer capacity per run and fast cool-down capability. The integrated controls machine provides users with the ability to monitor and adjust the process parameters with accuracy and confidence.