Used HITACHI / KOKUSAI DJ-1206VN-DF #9377286 for sale
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ID: 9377286
Wafer Size: 12"
Vintage: 2010
PECVD Systems, 12"
Process: TIN
2010 vintage.
HITACHI / KOKUSAI DJ-1206VN-DF is an advanced diffusion furnace and accessories equipment designed to meet the needs of the semiconductor, electronics, and photonics industries. The furnace boasts a unique combination of features that make it ideal for a wide variety of applications. The furnace system is equipped with the latest diffusion technology, including vacuum annealing, rapid thermal processing, sheet resistance control, an extremely fast switching electric resistance heating unit, and a large variety of accessories. The furnace also provides flexibility by being able to adapt to many different wafer sizes, with custom designed wafers and cold plates available for special requirements. The machine's core components, including the thermal control mechanism, the diffusion furnace, and the accessories, are all designed to meet the most stringent industry standards. The furnace has a wide temperature range, ranging from -200 to +1300C, with excellent repeatability and low off-gassing. The diffusion furnace also provides precision thermal control with a host of settings, such as heating rate, soak time, and Dwell time. The tool also comes with a number of accessories that make the asset even more powerful. For example, the accessories include two robotic waferhandlers that allow automatic wafer loading/unloading, robotic motion control systems, and a graphical user interface that allows for easy operation. Furthermore, the accessories provide tele-service capabilities, allowing for remote access to key furnace functions. Finally, the model can also be equipped with custom designed protection systems, critical for preventing the contamination of wafers. These systems include an inert gas supply equipment, a chemical vapor deposit system, a vacuum unit, and an in-situ cleaning machine. These advanced protection systems help ensure the highest quality of wafer production and keep downtime to a minimum. In summary, HITACHI DJ-1206VN-DF is an advanced diffusion furnace tool that offers great flexibility and a wide array of accessories. It is suitable for a wide variety of applications, and the adjustable temperature range and fast switching electric resistance heat asset can provide fast, precise thermal control. The model also offers protection against contamination and downtime to keep wafer production at the highest quality.
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