Used HITACHI / KOKUSAI DJ-1206VN-DF for sale

Diffusion Furnaces & Accessories

Manufacturer

HITACHI / KOKUSAI

Model

DJ-1206VN-DF

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Diffusion furnace Process: Poly_DS System configuration: Furnace unit: (5) T/C Heater controls (5)

128

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PECVD Systems, 12" Process: TIN 2010 vintage.

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PECVD Systems, 12" Type: TiN 2011 vintage.

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PECVD Systems, 12" Process: ALD 2007 vintage.

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PECVD System, 12" Process: ALD 2012 vintage.

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Systems Type: TiN.

137