Used ALCATEL / ADIXEN / PFEIFFER A601E #9301828 for sale
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ID: 9301828
Wafer Size: 8"
Etcher, 8"
Gasses: Ar, CF4, O2, C4F8, SF6
Pump 1: ALCATEL ADP 122P
Pump 2: ALCATEL ACP 20
Chiller: LAUDA PK8 CP.
ALCATEL / ADIXEN / PFEIFFER A601E etcher is a reliable and accurate dry etching equipment designed for the deposition of thin layers of metals or other materials on the surface of wafers. ADIXEN A601E is a versatile system with a wide range of variables that can be adjusted for the etching process. ALCATEL A601E utilizes a high power electron beam to create ionization of the working gas, etching material and surface of the wafer. The unit uses sophisticated optical methods to scan the etching area and adjust the parameters of the beam to provide the highest etching accuracy. The material that is being etched is then vacuumed away from the etch area, and the wafer is prepared for the next deposition. PFEIFFER A601E machine is capable of etching aluminum, copper, tungsten, titanium and gold and other materials. The tool can also provide a wide range of etching depth, and the etching process can be adjusted to provide improved surface quality. The asset can also be used to remove any imperfections in the surface of the wafer. A601E model is designed with a user-friendly interface, which allows the user to easily set the etch parameters. The user can also access all the parameters of the equipment through a computer interface, which can be used to monitor the process in real time, or to adjust the parameters accordingly. ALCATEL / ADIXEN / PFEIFFER A601E system is efficient and reliable, allowing users to quickly and accurately deposit thin layers of metals on the wafer surface. The unit is highly suitable for commercial and industrial applications. The machine is also capable of providing a higher accuracy and repeatability of the etch process than other etchers. The tool also has a low running cost and is easy to maintain.
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