Used ALCATEL / ADIXEN / PFEIFFER A601E for sale

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ALCATEL / ADIXEN / PFEIFFER A601E #293633801

ALCATEL / ADIXEN / PFEIFFER

A601E

Deep Reactive Ion Etcher (DRIE) 4" wafer chuck with LN2 cooling capability and helium wafer backpres
213
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ALCATEL / ADIXEN / PFEIFFER A601E #9301828

ALCATEL / ADIXEN / PFEIFFER

A601E

Etcher, 8" Gasses: Ar, CF4, O2, C4F8, SF6 Pump 1: ALCATEL ADP 122P Pump 2: ALCATEL ACP 20 Chiller:
170