Used AMAT / APPLIED MATERIALS Centura DPS DTCU #9279456 for sale

AMAT Centura DPS (DTCU) Reactor is a state-of-the-art semiconductor/nanofabrication chamber used for semiconductor deposition and etch processes. The DTCU is equipped with dynamic pressure control and variable dispersion capability to enable rapid and precise wafer process control. The chamber also features a full range of diagnostics, which are capable of continuous monitoring of critical process parameters. The primary application of the DTCU is for deposition and etching of metal layers, polysilicon, and dielectric films. It is equally suitable for formation of shallow trench isolation (STI) shallow junctions, as well as line narrowing and recrystallization processes. The DTCU also supports advanced processes such as multi-layered capabilities, ultra-high-rate deposition, and mixed-flow etching. Additionally, its advanced reactive-ion etching (RIE) chamber provides high selectivity ratios for conducting etch processes. The DTCU utilizes real-time wafer control for producing high quality films with lower levels of non-uniformity. This technology utilizes dynamic pressure control, injecting gas pulses that optimize process uniformity and film stability. As each wafer is processed, the chamber actively monitors wafer temperatures, wafer positional data, gas flow and pressure, wafer reflectance and plasma data. Inside the chamber several configurations of plasma sources are available, depending on the application. These include an RF inductively coupled plasma (ICP) source, electron cyclotron resonance (ECR) source, and helicon source. The DTCU is also equipped with a gas distribution system, which can deliver up to twenty different gases to the chamber. APPLIED MATERIALS Centura DTCU is an advanced, multifunctional reactor designed to precision process-thin films on wafers for the semiconductor industry. With its advanced dynamic pressure control and wafer positional tracking, diagnostic monitoring capabilities, and multi-layered capabilities, the Centura DTCU is a highly advanced and reliable semiconductor deposition and etching chamber.