Used AMAT / APPLIED MATERIALS Centura DPS #9157801 for sale

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AMAT / APPLIED MATERIALS Centura DPS
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ID: 9157801
Wafer Size: 12"
Metal etcher, 12".
AMAT / APPLIED MATERIALS Centura DPS is a next-generation reactor meant to address a broad range of device processing needs. It offers precise control over crucial deposition process parameters and is the latest iteration of the company's Dual Patterning Solution (DPS) family of products. This reactor is designed to reliably tackle today's advanced metrology, deposition, etch and surface treatment tasks with precise process control. AMAT Centura DPS is suitable for high-demand production of leading-edge devices, combining advanced deposition and patterning technology with improved process stability. The DPS delivers precise full-field etching and deposition for both high-aspect ratio applications, such as bores and trenches, and for more traditional device processes. The reactor houses an enclosed single-wafer process chamber, with substantially improved temperature, pressure, and plasma uniformity, as compared to its predecessor. Its convection-cooled design provides improved long-term stability, along with a much greater depth of focus. The reactor also offers built-in automatic chamber flush capability, providing homogenous process gases. The DPS provides exact control over deposition and etch process parameters, allowing for repeatable product results. Additionally, the process chamber offers real-time plasma and pressure feedback; eliminating the need for post-exposure model calibration and allowing for immediate process corrections. With its advanced wafer-support system, the DPS provides an ideal environment for both etching and conformal coating. In addition to its advanced process capabilities, APPLIED MATERIALS Centura DPS also offers superior safety features, including a built-in temperature sensor that can detect thermal runaway scenarios. Its individually addressable recipe modules allow for the users to adjust recipe settings with maximal flexibility. Centura DPS is a powerful reactor that can meet the demands of varied processes. With its state-of-the-art capabilities and superior safety features, it is an ideal choice for any device production environment.
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