Used AMAT / APPLIED MATERIALS CENTURA #293615044 for sale
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AMAT / APPLIED MATERIALS Centura Enabler is a highly advanced processing reactor designed to enable efficient and cost-effective Integrated Device Manufacturing (IDM) production. It is a multi-chamber system optimized to provide high throughput and substrate volume, while significantly reducing plasma damage levels. The reactor is designed to support extend a variety of process technologies including thermal oxidation, nitride deposition, low-k dielectric deposition, and photomask etch. It consists of three main components: the main chamber, the load lock, and the transfer chamber. The main chamber is equipped with precision radio-frequency (RF) generators, which, coupled with AC magnetic fields, enable superior process control and uniformity. AMAT Centura Enabler is capable of operating under a wide range of pressures, from 0.02 Torr to 760 Torr. Additionally, it features multiple substrate cooling and heating stages to enable thermal annealing and cooling processes. This enables faster thermal processes and maximises the uniformity of films deposited by providing a controlled temperature. The integrated load lock for APPLIED MATERIALS Centura Enabler allows for handling of larger wafers and is cooled by a helium-jacketed cold-finger technology. This provides faster throughput and improved substrate uniformity. The environmental isolation of the load lock also ensures efficient operation and ensures contamination-free substrates are loaded into Centura Enabler. AMAT / APPLIED MATERIALS Centura Enabler also features a sophisticated transfer chamber. This chamber aids in accurate substrate handling and is operated by a three-axis robot. Additionally, the transfer chamber is isolated from the main chamber, thus providing superior contamination control and process repeatability. Overall, AMAT Centura Enabler is a powerful reactor that provides high-quality IDM production at a significantly reduced expense. Equipped with a range of advanced technologies, it provides superior performance, productivity, and uniformity. APPLIED MATERIALS Centura Enabler is a powerful tool that is ideal for IDM production.
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