Used HITACHI M 308ATE #9410977 for sale
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ID: 9410977
Wafer Size: 6"
Vintage: 1991
Metal etchers, 6"
Chiller
Power supply: 208 V, 3-Phase, 150 A
1991 vintage.
HITACHI M 308ATE is an etcher / asher that is designed for use in semiconductor production. It is a fully automated system that produces high-quality devices with great accuracy. It utilizes a combination of high precision stepper motors, powerful lasers, and a solid oxide etching process. The unit is designed for reliable, high-speed, and repeatable etching and plasma ashing. Its high-speed, linear motor-driven X-Y stage provides rapid positioning and accuracy on parts with a maximum diameter of 48.5 mm. It also features an automatic arm that can move in a single plane and load onto the stage. The system is capable of etching/ashing through thick silicon substrates without any damage or distortion of the device's fine structure or circuitry. M 308ATE utilizes a four-level etching process, utilizing a combination of wet etching and plasma etching, which involves the bombardment of substrates with argon-based gas mixtures. The laser enables the creation of a hologram-like pattern in the circuit layout and offers an extremely fast mechanism for forming devices. In addition, the system utilizes a four-levelasynchronous process to trigger the next step cycle at the correct timing. The user-friendly operation makes it ideal for a wide range of applications, from batch production to research and development. It has multiple parameter settings and user-programmable functions for each step, enabling versatile and accurate operations. Additionally, it features a high-level of safety and reliability, with a built-in safety features such as automatic monitoring and controls. HITACHI M 308ATE is an innovative and reliable etcher/asher that offers high-resolution, high accuracy, and high-speed production. It provides a comprehensive solution for semiconductor production, offering a reliable and efficient platform that increases the productivity and quality of finished parts.
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