Used HITACHI M 308ATE for sale

Manufacturer
HITACHI
Model
M 308ATE
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HITACHI M 308ATE #293660510

HITACHI

M 308ATE

Metal etcher, 6" Microwave: 2.65 GHz RF Bias: 2 MHz 3 ECR Coils Etch chamber Microwave ash chamber:
80
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HITACHI M 308ATE #9410977

HITACHI

M 308ATE

Metal etchers, 6" Chiller Power supply: 208 V, 3-Phase, 150 A 1991 vintage.
50