Used LAM RESEARCH / NOVELLUS Concept 2 Speed #9293846 for sale

LAM RESEARCH / NOVELLUS Concept 2 Speed is an etcher/asher designed for industrial applications. It is a fully automated equipment designed to deliver fast, accurate and repeatable etching and ashing of semiconductor wafers. It incorporates advanced software controls to provide precise control for every process step. The system comprises a processing chamber, and a wafer handling unit for pre-processing, processing and post-processing of wafers with a wide range of current liquids or gases. It can be used for etching and ashing processes of copper, aluminum or other metal alloys. NOVELLUS Concept 2 Speed is capable of handling wafers up to 12 inches (304.8mm) in diameter with a surface flatness of 0.5 µm on average. The wafer handling machine consists of a transfer chamber, a wafer jacket, and a cassette lift. The transfer chamber is supplied with an RF generator that is mounted in the roof of the chamber, and a copper manifold that performs the physical isolation of the process wafers. Additionally, LAM RESEARCH Concept 2 Speed features a plasma cleaning tool designed to improve the wafer cleaning process. It is equipped with two RF generators, an upper one for sputtering deposition and a lower one for RF etching. With the help of two turbopumps, the Plasma Cleaning Asset keeps the upper pressure static for long periods of time. Concept 2 Speed also features a controller, which is an essential element for accurate process control. It includes precise timing, temperature, pressure, current and voltage control, ensuring uniform and precise results. LAM RESEARCH / NOVELLUS Concept 2 Speed provides uncomplicated and precise operating controls and offers an excellent display panel for clear viewing of process chamber parameters. Furthermore, it is equipped with a powerful software-controlled scanner so that multiple wafers can be processed simultaneously. It has the capacity to store three different recipes, each up to 256 steps. This allows complexity and time savings in production. The final outcome is a consistently secure and repeatable process controlled by one software platform.