Used LAM RESEARCH / NOVELLUS Speed #9235078 for sale
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LAM RESEARCH / NOVELLUS Speed is an etcher/asher used for wafer processing. It is a combination of two different systems, the LAM Etcher/Asher and NOVELLUS Asher. This equipment is designed to support a wide variety of wafer processing needs, including single wafer steps, planarization, and thin film deposition. The LAM Etcher/Asher is an advanced plasma etching system designed for precise wafer patterning. It uses a dual-stage ICP source configuration to generate an etch process that is highly uniform and efficient. This unit uses a patented Microzone™ etching machine to provide precise, high-throughput etching with optimal resolution. It is designed for control of etching parameters across all substrates, which helps to ensure uniformity of process results. The etching chamber is highly reliable, and can support a wide range of wafer processing needs. NOVELLUS Speed Asher is an advanced asher tool that can be used in conjunction with the LAM Etcher/Asher. It is designed to provide precise and uniform wafer thermal processes with the fastest possible cycle times. The highLAM RESEARCH Speed gaseous ashing process is used to deposit thin films of silicon dioxide on wafers. This asset provides fast and accurate wafer thermal processing for a wide range of wafer applications, including passivation, planarization, and metallization. The asher can also be used for surface cleaning and cleaning of wafer surfaces prior to solder reflow. The combination of the LAM Etcher/Asher and Speed Asher provides a highly reliable, productive wafer processing model for research and production. This equipment provides high throughput, accurate process results, and process uniformity, with the fast cycle times provided by LAM RESEARCH / NOVELLUS Speed Asher. Its advanced, easy-to-use control system ensures fast and consistent results, and helps users to quickly set up and optimize their process parameters. The LAMNOVELLUS Speed Asher is a reliable and cost effective way to process wafers for a variety of applications.
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