Used LAM RESEARCH / NOVELLUS Speed #9315261 for sale
URL successfully copied!
LAM RESEARCH / NOVELLUS Speed is an etcher/asher that is used for processing semiconductor components. The machine is designed to produce high-quality silicon wafers with excellent yield and performance. NOVELLUS Speed utilizes high-precision, high-throughput physical etching and chemical deposition processes using both wet and dry methodologies. LAM RESEARCH Speed is designed to enable the efficient production of single-structured (or standard) integrated circuits, MEMs (micro-electromechanical systems) and photonic devices. Speed uses two technologies for wafer processing - physical etching and chemical deposition. Physical etching is a process where layers are etched away using a chemical solution or gas to create the desired structure. Chemical deposition is a process where a chemical reaction of two substances causes a material to deposit on a surface or within a layer. LAM RESEARCH / NOVELLUS Speed allows patterning of various materials and thicknesses, as well as the ability to control the surface integrity. NOVELLUS Speed features a high-resolution visual inspection in-line equipment that visually inspects and measures multiple aspects of the silicon wafer. This system provides higher daily yields, higher throughput, improved quality and decreased maintenance costs. LAM RESEARCH Speed also includes a programmable substrate support unit, as well as substrate load and unload automation. This ensures proper support and handling of the wafer, and ensures that the wafer does not become damaged during the processing. Speed allows for process monitoring with the use of a real-time data acquisition machine, providing near-instant feedback of process improvements or issues. An integrated, on-board data storage tool stores all process data during the run, providing complete control over the etching/deposition process. LAM RESEARCH / NOVELLUS Speed also features LAM's Flexible Processing Center (FPC) software, giving greater control over hardware and process settings with real-time adjustments. The FPC allows for the execution of recipes with flexibility, enabling a wide range of different processes and applications to be completed with a single platform. NOVELLUS Speed etcher/asher is a highly reliable, highLAM RESEARCH Speed, cost-effective and accurate tool for fabricating integrated circuits, MEMs, and photonic devices. By utilizing high-precision automated process control, and advanced in-line visual inspection and substrate handling technologies, Speed ensures consistent wafer quality and repeatability. The FPC software allows for user-friendly programming of specific recipes and process controls, enabling versatile and efficient silicon wafer fabrication.
There are no reviews yet