Used LAM RESEARCH / NOVELLUS Speed #9351453 for sale

LAM RESEARCH / NOVELLUS Speed is an etcher/asher that is used for advanced semiconductor manufacturing. It is designed for optimal throughput, and is capable of processing up to a maximum of 600 wafers per hour. It is a high-performance, high-throughput etcher that is designed for the most demanding tasks in advanced semiconductor device processing. The core technology of NOVELLUS Speed etcher is its highLAM RESEARCH Speed gas system combined with its advanced plasma source. The gas system uses an array of gas distributors, which enables uniform gas distribution over the surface of the wafer being processed, while the plasma source has a wide range of gas types and pressures to select from. This allows for precise control of the etching process, fine control of lateral feature sizes and an effective optimization of overall factory throughput. The etching process is based on the same principle as reactive ion etching (RIE). Speed is equipped with a loadlock chamber, an etching chamber, a plasma source, and gas system. The wafers are loaded into the loadlock chamber where they undergo pre-cleaning and pre-treatment processes to prepare the wafer surface for processing. After the pre-cleaning and pre-treatment processes, the wafers are transferred to the etching chamber where a reaction gas is injected into it. The pressure and gas type used in the chamber are controlled to attain desired etching results. The plasma is then generated in the etching chamber to initiate the etching process and the heated reaction gas molecules react with the wafer surface to form thin surface films which are then etched away. The etcher also has several control interfacing modules such as an in-situ chamber diagnostics package, manual override, and advanced user control to ensure optimal etching results. The ability to monitor and control the entire process, from pre-cleaning and pre-treatment to etching, allows for maximum process uniformity and minimal excursions. LAM RESEARCH / NOVELLUS Speed etcher has proven to be an effective, reliable, and affordable etch solution for high volume production. Its flexibility and user-friendly control interface make it an ideal tool for manufacturers looking to keep manufacturing costs down and production throughput high. Whether it is used for deep etching of devices or simple planarizing and chemical-mechanical polishing, NOVELLUS Speed etcher provides the best results.