Used LAM RESEARCH / NOVELLUS Vector Express #293614948 for sale

LAM RESEARCH / NOVELLUS Vector Express is an etcher/asher designed to facilitate advanced semiconductor processing. It features a co-planar high-throughput tiling technology, which supports pattern densities greater than 20K matrix points, allowing higher throughput and faster throughput of device coverage. Additionally, NOVELLUS Vector Express is also capable of performing multi-patterning layer transfer on non-uniform layer thicknesses as well as both dry and wet etching, which gives the user greater control over their etch process. LAM RESEARCH Vector Express comes equipped with a comprehensive software suite that includes both batch processing and automatic optimization tools. This allows users to take advantage of enhanced process step combinations including etching, conformal coating, backgrind and patterning while providing uniform- and repeatable- results. The software suite also offers capabilities for thermal and electrical monitoring, helping ensure uniform- and repeatable- results over multiple wafer runs. In terms of engineering specifications, Vector Express offers a variety of etch rates ranging from 0.1 to 1 µm/min, with repeatability of ± 0.4 µm/min for a single-edge horizontal slot down to 10 µm in width. It is also capable of has a chamber size of 920 x 700 mm and is designed for up to 12-inch wafers and supports a variety of wafer materials. Designed to meet the evolving needs of the semiconductor market, LAM RESEARCH / NOVELLUS Vector Express showcases NOVELLUS commitment to providing top-of-the-line etching and ashing equipment. Its software suite and engineering specifications offer users a powerful toolkit to help them achieve precise and reliable etching processes. NOVELLUS Vector Express is a valuable addition to the semiconductor manufacturing process that allows users to create products with greater precision and faster throughput.