Used LAM RESEARCH / NOVELLUS Vector Express #293615299 for sale

LAM RESEARCH / NOVELLUS Vector Express
ID: 293615299
Wafer Size: 12"
Vintage: 2006
CVD System, 12" 2006 vintage.
LAM RESEARCH / NOVELLUS Vector Express is an advanced etcher/asher technology used to deposit materials such as dielectrics and metal layers, and perform high-precision etch and cleaning. This system is capable of producing accurate, reliable and high-yield products with a uniform and reproducible process. NOVELLUS Vector Express is the perfect tool for advanced device research, development and production in a variety of applications. LAM RESEARCH Vector Express is equipped with two precisely-controlled gas injection systems that produce a parallel flow of plasma source gas, shielding and etching gas, enabling high quality etch and cleaning results. It also has an optimized pressure and vacuum system for high performance etching for any application. The vacuum and pressure requirements are variable and adjustable to suit the process requirements. Vector Express is capable of providing excellent material removal and cleaning. It is designed to have a very small beam size that enables more precise and accurate vapor deposition of the material without any significant variation in thickness over the area of the substrate. This results in uniform and consistent dielectric layer thicknesses that are needed for excellent device performance. LAM RESEARCH / NOVELLUS Vector Express is equipped with multiple process monitoring solutions that enable reliable process control. These solutions monitor pressures and temperatures, electrode count, amount of material deposited or removed and other process parameters. This data allows for repeatable and reliable results that ensure consistent device performance. NOVELLUS Vector Express is used in a variety of industries including semiconductor, photovoltaic device manufacturing and other industrial application. The system is capable of producing high quality devices with extremely high precision, uniformity and reliability that are needed for the most advanced applications. Additionally LAM RESEARCH Vector Express is able to be easily integrated into industrial automation production systems, making it a perfect tool for industrial production environments. This advanced etcher/asher makes it one of the most reliable etching solutions available.
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