Used LAM RESEARCH / NOVELLUS Vector Express #293625918 for sale

LAM RESEARCH / NOVELLUS Vector Express is a fully automated etcher/asher designed to provide high throughput, high product quality and repeatable process performance with low cost of ownership. NOVELLUS Vector Express owes its superior performance to its robust, reliable design as well as its modular, scalable architecture. LAM RESEARCH Vector Express operates on the principle of chemical-mechanical polishing (CMP): a combination of mechanical force used to remove surface material, and chemical action used to dissolve the remaining exposed material. This allows Vector Express to effectively remove unwanted surface material from workpieces, from ultra-precise levels down to nanometer depths, including films of aluminum, tungsten, and other metals. LAM RESEARCH / NOVELLUS Vector Express comes with a wide range of chamber configurations to meet various customer requirements, including a combination wet/dry process, plasma etching, and low-pressure dry etching. Each configuration comes with etching tools that can be swapped out quickly, with no need for chamber re-qualification. The chamber is equipped with automated mechanical functions such as end-point detection, chamber assessment, and individual tool processes, making operation intuitive and efficient. NOVELLUS Vector Express also features an integrated production management equipment that automatically tracks the progress of every wafer, giving customers real-time visibility into their etching/aspiration operations. The system also provides a way to store and recall recipe data, ensuring consistent, predictable results throughout the production process. LAM RESEARCH Vector Express is designed to meet tight particle count requirements, with a digitized atmospheric control unit that can eliminate ambient particulates. The machine also offers an advanced particle control solution, with a direct particle measurement tool that allows process engineers to precisely adjust processing conditions in order to minimize contamination. Finally, Vector Express comes with a suite of software solutions that reduce downtime and improve process yields. These solutions, such as integrated proactive diagnostic and process monitoring tools, enable customers to maximize efficiency and productivity, and take cost-savings to the next level. Overall, LAM RESEARCH / NOVELLUS Vector Express is an advanced etcher/asher that offers robust, reliable performance and superior throughput, with exceptional repeatability and low cost of ownership. With its modular architecture and integrated software solutions, NOVELLUS Vector Express makes controlling and monitoring processes easy, improving yields and minimizing downtime.