Used LAM RESEARCH / NOVELLUS Vector Express #293652040 for sale

LAM RESEARCH / NOVELLUS Vector Express is an advanced plasma etcher / asher used in precision microfabrication processes. This versatile tool features a high-performance plasma source capable of etching and ashing a variety of materials, including metals, insulators and semiconductors. NOVELLUS Vector Express features an adjustable pressure and setpoint optimized for each substrate type, resulting in superior etch results with no damage to either the substrate or the process. With its dual RF generator and dedicated high-voltage source, LAM RESEARCH Vector Express enables deep etch depths and micron-level precision for complex structures. Vector Express is ideal for high-throughput production, with fast cycle times, minimal vacuum and reaction chamber conditioning, and low chemical usage. Its highly automated operation allows for easy set-up and monitoring of parameters, allowing for fast, repeatable results. The system also has an auto-tune feature which calibrates the plasma source for optimal performance. With its advanced diagnostics and on-board gas mixing and analysis system, LAM RESEARCH / NOVELLUS Vector Express ensures superb etch quality and minimized process variability. In addition to etching, NOVELLUS Vector Express is capable of ashing, layer stripping, and other dry processing operations. Its versatile, robust gas distribution platform is optimized for specific process chemistries and provides substrate-independent repeatable etching results. And with its high-performance showerhead, it can etch and ashe up to 6" wafers with no degradation of process performance. LAM RESEARCH Vector Express also features a unique plasma etch backup, letting users quickly and easily restore etch settings to a prior, optimized state. Vector Express is an ideal tool for precision microfabrication applications, providing speed, accuracy, and reliability that moves fabrication processes quickly from the R&D stage to high-volume production.