Used LAM RESEARCH / NOVELLUS Vector Express #293754400 for sale

LAM RESEARCH / NOVELLUS Vector Express (VX) is an etcher/asher equipment, designed for the production of accurate, high-quality circuit patterns in a variety of application processes. The VX system is equipped with state-of-the-art technology, which enables it to perform precise patterns, while achieving high volume throughput and excellent uniformity results. The VX utilizes advanced ablation control software, which allows it to precisely control both etching and ashing processes. This allows the user to define the exact pattern to be etched, as well as the exact etch depth and lateral accuracy. The unit is further enhanced by LAM's Auto-Align and Auto-Rotate feature, which shift and rotate patterns for better alignment and accuracy. The VX is also highly modular, allowing users to configure the machine according to their needs. The tool employs a Jet-Step process, to ensure uniform and repeatable patterns. This consists of several steps, including a pre-etch, where the substrate is pre-coated with an etch-resistant material. This is followed by a main etch step, where the actual etching of the patterns is carried out. Finally, the off-etch step ensures that any excess material or residue is removed. The VX is also equipped with a Dual Multi-Faceted Illuminator (DFI). This consists of a reflective multi-lambertian optics package, consisting of two levels of f-theta and telecentric lenses. This allows the etching to take place in a multi-directional manner, allowing for more precise etching. The asset also incorporates a built-in vision model, which ensures superior registration during etching. This ensures that the finished product is of high quality and uniformity. In addition, the equipment is designed to reduce particle contamination and minimize downtime. It features a nanoparticle collection system, designed specifically to capture particles during etching, preventing them from contaminating the substrate. This further includes a condensation chamber, which allows for controlled environment and efficient capture of particles. Finally, the VX unit features advanced diagnostic software. This allows users to monitor the etching and ashing parameters for different substrates, enabling them to make adjustments and optimize the machine for better results. All of these features allow the tool to achieve unmatched precision, accuracy and throughput, resulting in a high-quality finished product.