Used LAM RESEARCH / NOVELLUS Vector Express #293793396 for sale

LAM RESEARCH / NOVELLUS Vector Express is an advanced etcher and asher equipment that enables high-throughput production of sub-micron devices. It is optimized for the production of highly complex, high-aspect-ratio structures used in the fabrication of modern semiconductor devices, including FinFETs, MURA, and other advanced structures. NOVELLUS Vector Express etcher system combines physical etching with selectivity and precision. It provides three different etching modes: isotropic etching, directional etching, and over-etching. Isotropic etching uses a single etch mask to create uniform etching from all sides. Directional etching, which is optimized for high-aspect-ratio structures, uses two masks for high vertical selectivity - allowing for etching from the top, with lateral etching from sides only in the areas not covered by the mask. The over-etching mode is optimized for ultra-smooth oxide etching, with up to two-millimeter over-etching for precise trimming operations. LAM RESEARCH Vector Express also features an integrated in-situ monitoring unit for etching quality assurance. This machine enables continuous monitoring of endpoint detection and process optimization. It is equipped with a CF4 etch source and hot surface source, enabling higher-throughput processing for delicate features and minimizing the risk of damage to the underlying oxide layer. The tool also features an isolated, static-free process chamber, to ensure the highest oxide quality. Vector Express etcher and asher asset is designed with a very high degree of modularity, flexibility, and scalability, allowing for future upgrades and expansions. It includes an extensive library of recipes and recipe development tools, enabling the most demanding applications through manual adjustment and optimization of the process parameters. LAM RESEARCH / NOVELLUS Vector Express is ideally suited for process integration in advanced packaging, eWLB, and 3D-stacking fabrication processes, offering improved reliability and increased manufacturing yields.