Used LAM RESEARCH / NOVELLUS Vector Express #293800641 for sale

LAM RESEARCH / NOVELLUS Vector Express is a high-performance etcher and asher tool used in microfabrication processes. It is a multi-chamber system with eight independent chambers capable of performing multiple process steps simultaneously. NOVELLUS Vector Express is a platform for etching dielectrics, metals, photoresists, low-k materials, along with gap filling and cleaning applications. The etcher has a high Plasma Source Power (PSP) of 1360W operating in parallel operation mode. This high power ensures successful enablement of high-speed etching processes which provide microfabrication needs by with high throughputs. Additionally, the high PSP is beneficial for etching of etching sensitive materials and hard to etch films. Moreover, LAM RESEARCH Vector Express is suitable for etching multi-layer stacks comprised of both traditional and advanced materials. Vector Express' flexibility is further enhanced through its efficient cooling system which allows its chambers to be operated within 0-110°C range. This ensures etching of nearly any material without damage or degradation of the substrate. LAM RESEARCH / NOVELLUS Vector Express' temperature-controlled roll and chuck provide uniform and precise pre-heating of the substrate to provide an even etch without pattern distortion. It has a fast wafer-climate shift of ±20°C within 5 seconds which can reduce defects and improve current yield. Moreover, its thermal control accuracy is also excellent with a stability rate of better than 0.1°C. This makes NOVELLUS Vector Express ideal for successful etching of delicate patterns and for increasing yield. LAM RESEARCH Vector Express also boasts a high degree of process control. Its process-based interface has been designed to let users control all etching parameters, such as plasma intensity, gas flow, RF frequency, pressure, and cooling mechanism. All these settings are readily available from the interface and can be monitored and adjusted to fine-tune the etching process easily. In conclusion, Vector Express is a premier etcher/asher tool which provides unsurpassed level of flexibility for etching various microfabrication materials. It is well-suited for etching high-aspect ratio features and for working on intricate micro-patterns due to its efficient temperature control and high PSP capabilities. Furthermore, its easy-to-use process-based interface facilitates easy control and monitoring of all etching parameters. All these features make LAM RESEARCH / NOVELLUS Vector Express a great choice for those looking to perform efficient, precise, and high-quality etching and ashing operations.