Used LAM RESEARCH / NOVELLUS Vector Express #293802072 for sale

LAM RESEARCH / NOVELLUS Vector Express is an etcher/asher equipment for wafer lithography. The system is compatible with a range of standard photoresists and has the ability to support up to five different etch processes. NOVELLUS Vector Express is designed for wafer UV exposure applications and offers superior feed rate, improved uniformity, and a wide operating window. This unit has a six-field rotary chuck that works with positive and negative patterning, allowing for both single- and double-sided etch processes. It also features a multi-aperture array which provides higher exposure uniformity over large areas. Its lightfield is made up of a selectable array of red, green, and blue LED exposure sources which can be fine tuned for various etch processes to ensure the precision and quality of each wafer. This machine also features an advanced pulse width modulation (PWM) controller which helps to precisely control etch rates. The PWM controller includes a built-in diagnostics tool which minimizes optimization time and improves yield. The asset supports memory-programmable processes for quick batch and recipe recalls. It is also compatible with a range of popular lithography model controllers such as DMD, DFB, ACORN, and SMD. In addition, LAM RESEARCH Vector Express is designed with a top-down deposition process. This provides for better edge bias control, higher throughput rates, and improved uniformity which result in higher yields. The equipment also features a multi-zone gas delivery system which helps to optimize photoresist patterns and allows for faster process cycles with less overexposure than other lithography systems. Furthermore, Vector Express has advanced safety features which keep the unit safe to use. It includes a two-stage depressurization and purge process prior to handling the wafers. An ultra-high vacuum is maintained at all stages of the lithography process and its water-cooled mask stages ensurecoolant is always available to minimize stress on the wafer. With its powerful and efficient lithography capabilities, LAM RESEARCH / NOVELLUS Vector Express is an ideal solution for semiconductor manufacturers looking to produce high quality chips and wafers. Its extended feature set offers the versatility needed to support diverse etch processes and its advanced safety features make it easy to use, ensuring users are always in complete control of their wafer production.