Used LAM RESEARCH / NOVELLUS Vector Express #9215207 for sale

LAM RESEARCH / NOVELLUS Vector Express is an etcher/asher equipment designed for high-volume throughput and high-density pattern processing. NOVELLUS Vector Express has a modular architecture which supports both full and partial area patterning, providing a high degree of customization and flexibility. It is designed to allow for simple and easy adaptation of process recipes, based on the configuration of the system. LAM RESEARCH Vector Express features a large central processing unit, an array of memory channels and a high-precision DC motor-driven Y-axis staging unit. The Y-axis staging machine allows precise movement of the wafer throughout the process, with the capability to move the wafer anywhere within the process area. The tool also includes a high-speed computer interface, allowing for monitoring and control of the process from a remote location. Vector Express is capable of processing 450-mm wafers with high-density pattern resolution. It also has a high-accuracy planarization control asset as well as high-accuracy video-inspection systems. The model's numerous sensors provide real-time monitoring and control capabilities, enabling the equipment to reach high throughput levels with minimal downtime and maximum efficiency. LAM RESEARCH / NOVELLUS Vector Express integrates a comprehensive suite of software tools and software-driven process controls, such as CDS (Computer-Directed-Scheduling) and SLE (Software-Led-Efficiency). These software tools enable customers to optimize the system for their production needs, as well as to integrate NOVELLUS Vector Express into their existing production environment. The unit is capable of executing a variety of etching and ashing process recipes. These recipes can be optimized for various etch ratio and substrate protection requirements. Furthermore, LAM RESEARCH Vector Express allows customers to develop customized etch processes to meet specific applications. The machine's etching and ashing processes are designed to meet the highest industry standards in terms of quality and sustainability. Vector Express is AEC-Q100 certified, indicating its reliability. The tool also meets the emission standards for volatile organic compounds imposed by the Environmental Protection Agency. Overall, LAM RESEARCH / NOVELLUS Vector Express is an ideal etcher/asher for customers who require high-speed process throughput, high-density pattern resolution and quality, customizable recipes. It is designed to provide precise and reliable etching and ashing processes while reducing downtime and improving overall operational efficiency.