Used LAM RESEARCH / NOVELLUS Vector Express #9235816 for sale

LAM RESEARCH / NOVELLUS Vector Express is an advanced etcher / asher equipment used to create finely patterned surfaces with complex layouts. It features a high resolution XY stage for precision alignment of the wafer and is equipped with a direct-to-disc vacuum chuck for optimal wafer handling and positioning. The system has a wide range of process options, allowing for flexibility in production. It is designed for high-volume production with fast and accurate process rates, offering precise repeatability for consistency over multiple runs. NOVELLUS Vector Express comes with a range of tools and features for repeatable processes such as a highly accurate 5-axis linear drive stage, a large 8-inch e-beam source, and a built-in recipe manager for full process management. It also comes with a full set of automated smart cleaning agents such as spray-in-place cleaners and integrated load locks for reliable wafer handling. With its precise, flexible, controllable, and repeatable process, LAM RESEARCH Vector Express is an ideal choice for etching/asering high-density layouts. The unit is also designed for compatibility with the latest generation of submicron technology and comes Standard with multi-zone scanning for defect-free operation. Vector Express is built with a low-maintenance, efficient layout making it easy to operate and maintain, and integrates easily with other machines for a seamless production environment. LAM RESEARCH / NOVELLUS Vector Express also has a range of safety features to protect its operators, including a comprehensive gas leak detection machine, confined space monitoring, and a ventilation tool. It also is built with remote-control capability so that operators can monitor the asset operations remotely. With all of these features, NOVELLUS Vector Express is a reliable and safe etching/ashing solution for production lines.