Used LAM RESEARCH / NOVELLUS Vector Express #9294406 for sale

ID: 9294406
CVD Systems, 12" Process type: PESIN / PETEOS 2004 vintage.
LAM RESEARCH / NOVELLUS Vector Express is an etcher/asher designed for high-throughput processing within the semiconductor industry. NOVELLUS Vector Express is a high-performance, high-speed, multi-beam equipment that can be used for a variety of etching and deposition processes including anisotropic etching, isotropic etching, and deep-etching. It utilizes multiple operating modes to provide fast, precise, targeted processing of wafers, including a high-throughput processing mode which can be used to rapidly etch or deposit materials. LAM RESEARCH Vector Express utilizes an laser-like light source to ensure uniformity and accuracy in its processing. Its light-beam is processed through several optical components including a digital mirror device (DMD) and a spatial light modulator (SLM). The DMD creates a precise combination of light waves that produce a laser-like light beam, while the SLM modulates the illumination pattern so that the beam is accurately shaped to meet the specific needs of a given process. Vector Express also features an Ultra High-Intensity Ion Beam (UHI-IB) system which accelerates and directs ions towards the patterned substrate. This unit is capable of producing better etching processes by producing faster, finer and more precisepatterns. LAM RESEARCH / NOVELLUS Vector Express makes use of a tiled etching array which programs the placement of the ion beam to precisely etch specific patterns. This machine is well suited to etch deep and complex patterns with high quality and reproducibility. NOVELLUS Vector Express is widely used in the Semiconductor industry as it can be used to etch complex patterns with high precision and speed while using minimal chemical materials. It is capable of rapidly producing accurate etch patterns, depositing materials with excellent conformality, and performing fast processes with very low thermal loading. LAM RESEARCH Vector Express is also fully compatible with traditional etching and deposition processes, allowing researchers to use the same tools, equipment, and materials for both wet or dry processing. Finally, Vector Express is user-friendly and requires minimal maintenance, meaning that it can be quickly and easily integrated into existing laboratory or production setups.
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