Used LAM RESEARCH / NOVELLUS Vector Express #9298589 for sale

LAM RESEARCH / NOVELLUS Vector Express is a multi-chamber etcher / asher manufactured by NOVELLUS. It is used for precision etching or ashing of patterned masks and structures in the semiconductor and electronic industries, as well as in research and development applications. It is designed with the capability to carry out both traditional etching and new ashing operations on large single substrates up to 200mm in diameter. NOVELLUS Vector Express is an advanced, fully automated production etcher/asher, with multiple process chambers that can accommodate a wide range of sample sizes and configurations. LAM RESEARCH Vector Express is equipped with the industry's leading etching and ashing sources, combining the speed, accuracy, and cost-effectiveness of each process. It has low-temperature etch capability down to 25°C, with low-pressure operation and tight process-control capabilities. Vector Express provides temperature stability within ±0.1°C of setpoint, with process steps in one tenth of a second and time-of-flight precision, providing excellent process repeatability. Its intuitive user interface makes programming fast and easy, both remotely and at the machine. LAM RESEARCH / NOVELLUS Vector Express is the first to combine both chamber isolation and rapid thermal annealing (RTA), providing a single etch and ashing system that can handle a wide range of process requirements. It has an expandable, upgradeable and highly flexible configuration enabling great flexibility for different etching challenges. Processing chambers can be easily and rapidly exchanged, depending on the process requirements. The machine has micro-launcher and high-precision scanning features for complete automation of the etching and ashing processes. NOVELLUS Vector Express is also designed for reliable operation in a wide variety of rugged manufacturing environments, with a control system designed to reduce downtime and maintenance costs. This machine also meets all of the latest safety regulations and standards, with cutting-edge technology providing reliable, low-cost operation and longer lifetime performance. LAM RESEARCH Vector Express is an ideal choice for anyone seeking the highest level of precision and reliability in their etch and ashing operations.