Used LAM RESEARCH / NOVELLUS Vector Express #9314358 for sale

LAM RESEARCH / NOVELLUS Vector Express is an etcher/asher designed for accurate etch control in semiconductor manufacturing processes. It offers superior of capabilities and process stability, with a high deposition rate of up to 200,000 wafers per hour, and a low-defectivity substrate deposition. NOVELLUS Vector Express is a flexible, high-speed, full-field etcher/asher with advanced process control software. The advanced software features allow precise etching conditions to be set for each etching run and ensure that etching operations can be executed with stable process conditions. LAM RESEARCH Vector Express etcher/asher is designed with an automated wafer loading/unloading system to reduce manual labor and ensure minimum contamination risks, along with a gas distribution network to provide optimum chemical species/reagent stability. It is capable of etching and ashing high aspect ratio structures, as well as high-resolution features, using a variety of gases such as chlorine, fluorine, sulfur hexafluoride, and oxygen. The etcher/asher is compliant with the latest semiconductor industry standards, such as SEMI P-12, P-17, and P-25. Vector Express etcher/asher utilizes a modular, user-friendly software interface to manage all etching/ashing operations. The software provides an easy-to-use environment for setting up etching parameters such as process duration, temperature, power level, and flow rate, as well as an intuitive user interface for monitoring etching/ashing operations. The software also supports real-time flow rate monitoring, process history storage, and post-process analysis tools. LAM RESEARCH / NOVELLUS Vector Express etcher/asher can be used for a variety of etching/ashing operations such as shallow trench isolation (STI) etching, deep trench isolation (DTI) etching, selective oxide etching, wafer cleaning, and metal deposition. The etcher/asher is designed with an embedded vision system to allow operators to visually verify feature structures before etching/ashing operations. Additionally, the etcher/asher is designed with a full-field plasma etching technology, which provides a homogeneous etch depth across the entire wafer irrespective of the feature size or location on the wafer. NOVELLUS Vector Express etcher/asher is a powerful and flexible machine for semiconductor manufacturers. It offers superior etching/ashing capabilities, excellent process control, and reduced contamination risk, making it an excellent choice for etching/ashing operations in advanced semiconductor process flows.