Used LAM RESEARCH / NOVELLUS Vector Express #9362218 for sale

LAM RESEARCH / NOVELLUS Vector Express is an advanced etcher / asher that enables precise etching and ashing of semiconductor structures. NOVELLUS Vector Express uses advanced technologies to achieve superior etch rates that are up to ten times faster than traditional etch processes. LAM RESEARCH Vector Express is a fully integrated and cost effective etching and ashing equipment, designed to allow for maximum flexibility and productivity in semiconductor manufacturing. Vector Express offers high throughput with its powerful control system, capable of a maximum process speed of 25 cm/min. Utilizing its 4-axis motion unit and enabling simultaneous moves along the X, Y and Z axes, as well as an auxiliary rotation axis, LAM RESEARCH / NOVELLUS Vector Express is capable of precise process control. Using a patented, non-contact, auto-following mechanism, NOVELLUS Vector Express can perform etching and ashing operations on large wafers in a single setup. The core technology of LAM RESEARCH Vector Express is its DC Plasma Source, which is capable of high etch rates and superior uniformity. DC plasma sources offer low cost of ownership, as they use fewer gases, need minimal consumable parts and extremely low maintenance. The DC Plasma Source also supports a variety of gases to enable etching for specific applications. In addition, Vector Express is able to deliver unparalleled levels of etch depth uniformity, using its advanced plasma source, which is capable of tightly controlling etch depths within a few thousandths of a mil across the wafer. LAM RESEARCH / NOVELLUS Vector Express is also configured with advanced process control capabilities, designed to provide precise process control in a single click. The machine offers advanced software tools such as its Advanced Automated Etch Control (AAEC) and Low Total Pressure Etch (LTPe), enabling users to achieve high process yields with minimal setup time. Additionally, NOVELLUS Vector Express features an extra-long exhaust plenum design to provide reliable and efficient exhaust of chemically reactive etch and ash gases from the process chamber. In conclusion, LAM RESEARCH Vector Express is an advanced etcher / asher designed to provide maximum productivity and process performance. Through its patented technologies and sophisticated process control capabilities, Vector Express is able to achieve high-quality etching and ashing with maximum throughput.