Used LAM RESEARCH / NOVELLUS Vector Express #9378305 for sale

LAM RESEARCH / NOVELLUS Vector Express is a general purpose etcher / asher, ideally suited for mid- to high-volume production of a variety of semiconductor device structures. NOVELLUS Vector Express features a robust film deposition equipment and a unique laser patterning process, providing exceptional step coverage and precise line fidelity. The system is compatible with all major resist chemistries, enabling both plasma etch and advanced photoresist removal options. LAM RESEARCH Vector Express also features a novel process controller which provides the user with a comprehensive set of process monitoring and control functions. Vector Express is built for high yield production, with a narrow focus on capacitors, transistors and other advanced device structures. The unit includes a 200mm handling platform, enabling efficient loading, transport, and unloading of wafers, and a full range of process recipes. The recipe generator allows the user to quickly develop customized recipes, and provides a powerful platform for process optimization. LAM RESEARCH / NOVELLUS Vector Express has been designed to maximize throughput and process yields, while minimizing cycle times. It features a high-precision, high-throughput chamber for special etch applications and for bulk etch processes. The machine is engineered for superior performance in both batch and cluster configurations. The tool employs a unique laser patterning process, which eliminates classical photoresist removal techniques and provides precise etch patterns with minimal linewidth variation. NOVELLUS Vector Express also incorporates two different types of trace cartridges, providing optimum trace spacing, line accuracy and patterning fidelity. LAM RESEARCH Vector Express is powered by a wide range of hardware and software tools for maximum control and automation. It includes a powerful recipe generator, an integrated process parameter control module, and an advanced data logging and analysis package, all of which allow the user to manage and optimize the etching process. Vector Express is certified for use in a variety of cleanroom environments, including ISO 14644-1 Class 5 and Class 7. Its comprehensive design and rigorous testing ensure high performance, stable production, and improved reliability, making it ideal for commercial and research-grade applications.