Used LAM RESEARCH / NOVELLUS Vector Express #9390434 for sale

LAM RESEARCH / NOVELLUS Vector Express is a multi-chamber, state-of-the-art batch etcher / asher equipment used in semiconductor processing. A fully automated batch process capable of running any number of media machine cycles simultaneously, allowing for high throughput and accuracy. The system includes three independent chambers with computer-controlled operations, custom chamber pressure controls, and a high-powered, variable frequency RF generator for fine-tuning power. NOVELLUS Vector Express enables cooperative etching, which is an innovative process where one etch chamber alternately supplies the wafers with inert nitrogen (for etching) or active oxygen (for cleaning). The unit includes a variety of etching and cleaning tools, including reactive-ion etching (RIE) technology, in-situ cleaning with an embedded oxygen plasma source, and programmable dry etch processes. This allows for the removal of unwanted layers of material and the depositing of desired conductors in an extremely precise manner. The high-accuracy motion control of LAM RESEARCH Vector Express helps to ensure accurate process repeatability. This is supported by the machine's advanced data handling capabilities that provide real-time analysis and feedback of the process, allowing operators to optimize and control the etching or ashing process. The tool can also be used for the ashing of equipment such as wafer lifters and other pieces of semiconductor equipment that require frequent cleaning. Ashing enables a much more controlled process than manual cleaning with solvents, as it removes unwanted residue with precision and without risking damage to the components. To provide optimal safety for users, Vector Express comes equipped with an additional monitoring module to check for hazardous gas leaks or other unsafe conditions. Finally, as the most environmentally friendly etcher in its class, the asset has an integrated exhaust model to ensure any harmful gases are safely managed and filtered.