Used LAM RESEARCH / NOVELLUS Vector Express #9412146 for sale
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ID: 9412146
Wafer Size: 12"
Vintage: 2017
CVD System, 12"
LDR TEOS Primary process
USG/SiN Secondary process
Direct liquid delivery system (ADV TEOS)
ASTRON EX RPC Generator
SIRF RF Configuration
APEX 5513 HF Generator
PDX 2500 LF Generator
SERVO spindle, with water cooling
Pedestal Options: Conditioned low profile
Standard shower head
Gas box configuration: STD, 13-channels GB
Vortex ATM Robot
(2) FOUP
TDK Load port type
TAKEX Standard light curtain option
KASHIYAMA NV60 Load lock pump
2017 vintage.
LAM RESEARCH / NOVELLUS Vector Express is a high-performance etcher/asher that employs advanced etching and etch processes to enable high-precision patterning and etch processing. This versatile equipment combines the latest technology with LAM's highly acclaimed NOVELLUS Vector Express etch process. LAM RESEARCH Vector Express is designed to improve processing uniformity, accuracy, and throughput and enable high-precision manufacturing of even the most complex topographies and geometries. Vector Express incorporates numerous features and design elements to deliver maximum etch performance and an improved user experience, with cutting-edge features such as an automated system calibration, advanced film deposition and etching control software, and a prominent user interface. These features enable the unit to provide superior etch consistency and uniformity, and minimize the time required for tool maintenance and process optimization. The machine also provides for automated recipe generation and setup capability, as well as a comprehensive set of integrated process monitoring tools. The use of advanced sensors and process diagnostics systems to detect and respond to process parameters allows LAM RESEARCH / NOVELLUS Vector Express to adjust itself to the optimal machining parameters for each application. This ensures high-precision etch through a wide range of materials, eliminating the need for costly manual set-up and calibration. NOVELLUS Vector Express provides an integrated wafer-handling tool that is both reliable and easy to use. The wafer-handling asset is designed to minimize unwanted contamination by providing a tightly sealed and clean chamber, with a baffled exhaust flow, and optimized substrate and pedestal designs. Wafer handling is also made simple and efficient thanks to LAM's intuitive SmartCart™ model, which enables the positioning of the wafer at the correct location on the substrate. The equipment is powered by a robust software platform which enables users to easily create, save and load their recipes, as well as providing support for both standard and proprietary etch profiles. Customization of the etch process is made easy and intuitive through the use of LAM's integrated Process Expert™ software, which provides on-the-fly etch optimization. Its intuitive user interface also allows users to quickly develop recipes and quickly save them for later use. Overall, LAM RESEARCH Vector Express is a powerful, reliable, and user-friendly etch/asher system that offers industry-leading etch performance and efficiency. It is the perfect tool for high-precision etching and is capable of meeting the most demanding requirements in the industry.
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