Used LAM RESEARCH / NOVELLUS Vector Extreme #293625417 for sale

LAM RESEARCH / NOVELLUS Vector Extreme is an etcher and asher that combines plasma processing, advanced chamber design, and electrostatic-shielded jig technology to deliver flexibility, performance and productivity. With excellent process control and configurability, NOVELLUS Vector Extreme is ideal for front-end and back-end semiconductor fabrication processes. LAM RESEARCH VECTOR EXTREME has a 600mm high aspect ratio and 6-zone balanced chamber with a low electrode power,which provides improved dielectric uniformity and etch profile control. It also utilizes a unique high-frequency inductively coupled plasma (ICP) source to achieve excellent etch rate uniformity, cost-effectiveness, and minimized sputtering. LAM RESEARCH / NOVELLUS VECTOR EXTREME also employs a unique Electron Cyclotron Resonance (ECR) source for maximum uniformity and etch rate capability. The ECR source helps minimize arcing plugs in touch devices and integrated circuits, and helps reduce by-products and improve material properties. Vector Extreme also features a dual silicon carbide electrostatic-shieldeted jig with bi-directional jig rotation, which minimizes contamination. LAM RESEARCH Vector Extreme also has adjustable pressure and variable fluence control , and with the right process tuning, can deliver world-class throughput and excellent yields. It's ideal for deposition, etching and ashing of a wide variety of materials, including silicon, copper, germanium, silicides, tungsten, and nitride. With advanced control software, VECTOR EXTREME can be easily tuned and monitored to ensure optimal process stability, control set points and profiling, minimizing downtime and improving yields. NOVELLUS VECTOR EXTREME is an ideal etching and ashing solution for high-volume applications due to its improved throughput and excellent process control capabilities.